Tescan - Detekce referenčních značek v obraze FIB/SEM

Detection of reference marks in the FIB / SEM image

contract

Detection of reference marks in the FIB / SEM image

1606/5000 The subject of the work is the design and evaluation of the algorithm for accurate and reliable detection of the reference mark in the image of SEM and FIB microscopes. The mark consists of a simple cross, the model is prepared by TESCAN Brno, s.r.o. (hereinafter TESCAN) as part of the first stage. The brand may have different quality and different damage. The Faculty of Information Technology (FIT) compiles algorithms and authentication software for detecting this mark in a SEM and FIB microscope image. The first step of the algorithm is the detection of the mark in the image, the second step is the exact localization. The first step will be solved using a simple detector, such as Boosted Soft Cascade, the second step with a suitable algorithm, eg using a convolutional neural network. For comparison, the usual technique of phase correlation detection will also be used.

Zemčík Pavel, prof. Dr. Ing. (UPGM FIT VUT) , research leader
Juránek Roman, Ing., Ph.D. (UPGM FIT VUT) , team leader